?佃?
???
????/a>
寰?俊?????/em>
WB400-A?ㄨ???ㄦ?跺??????瓒?澹版????璁惧?
瑙??煎????/div>
浜у????杩?/strong>
WB400-A搴??ㄤ?6/8/12瀵告?跺??妫?娴?锛?????EFEM?跺??涓?涓???绯荤?锛?杩??ㄦ????骞冲?帮?瓒?澹版????绯荤?锛?姘????骞茬郴缁?锛?瀹??颁?浣????ㄨ???ㄦ?跺??妫?娴?瓒?澹版????娴?璇???
瓒?澹版尝???????跺??????宸ヨ?轰腑涓?????缂虹??璐ㄩ???у?跺伐?枫??浠ュ?舵??????楂??垫??搴︺???介??瑙????ㄧ???㈢?????硅?藉??锛?涓哄伐绋?甯???渚?浜????????㈣川????????瑙??尖??锛???‘淇??跺????????????????楂??ㄤ欢?????у???ㄥ?ㄤ?缁撮??????????灞????抽???????涓???
?稿?????/strong>
| 椤圭??/b> | ????/b> |
| ?跺??灏哄?????/td> | 8?? 12? Wafer锛???搴︼?60-3000 um锛? |
| ?㈠ご??缃?/td> | ???㈠ご锛????㈠ご锛????㈠ご |
| 瓒?澹版?㈣?藉?ㄩ????????/td> | 1~500MHz |
| X/Y ???????达???澶?绮惧害 | 420mmx320mm锛?Max锛?锛?卤0.5um? |
| ??澶ф???????? | 1500mm/s |
| ???烽???? | 1-5G/s ???? |
| ?㈠ご棰??? | 5-230MHz ???? |
| ??楂?????绮惧害 | 1um/Pixel |
| ????骞冲?扮??? | 澶х???冲钩? + 榫??ㄥ??椹辩?寸嚎?垫??/td> |
| 娲???搴︾?绾?/td> | Class 100 |
| 杞?欢????绯荤? | ???? NDTS 绯荤?锛??峰? AI 缂洪?疯???ㄨ????藉?? |
| 璁惧?灏哄? | 2000 x 2200 x 2200mm |
浜у??缁???灞?绀?/strong>
涓昏?缁???
| 缁??? | 璇存?? |
| EFEM 绯荤? | ?诲?归???? loader Port锛?瀵昏竟??????????烘??? 绋冲?????跺?? ?诲??伴????ㄥ??锛????? EFEM 绯荤?绋冲?????锛??????????? E84 澶╄溅瀵规??/td> |
| 杩??ㄦ?璇?骞冲??/td> | ?诲ぇ???冲钩?板????瑁?缃???????垮??妫?娴?杩?绋???????br>?婚???杈ㄧ?? (0.1um)锛?楂???澶?绮惧害 (卤0.5um)锛?楂???锛?1500mm/s锛?杩?琛??у??/td> |
| 瓒?澹版尝????绯荤? | ?绘????瓒?澹版尝????? (500MHz)锛?瓒?澹版尝?㈠ご (230Mhz)锛??版??????? 2G/s ?婚?????ㄨ???? NDTS 瓒?澹版????????杞?欢锛?????妫?娴??跺?????ㄧ┖娲? / ??灞? / 寮??╃?寮?甯?/td> |
| ?跺??妫?娴??版????? | ?昏?????跺??绠＄?????斤??????跺??瀹??跺?ㄦ??缂洪?峰??????绠＄?? ?绘??????瀵间?琛?涓????? SECS ??璁?????规????姹?瀹??舵?ュ??锛?瀵规?ュ??风? MES 绯荤? |